Kingsemi, a manufacturer of semiconductor production equipment, equips chipmaking with coaters, developers, spray coaters, strippers, wet etchers and single-wafer cleaners.
Kingsemi is a manufacturer of semiconductor production equipment centered on the steps that apply, develop and clear chemicals for patterning wafers. It was started by the Shenyang Institute of Automation of the Chinese Academy of Sciences to supply chipmakers with production equipment and integrated process solutions. Its tool families cover coaters, developers, spray coaters, strippers, wet etchers and single-wafer cleaners configured to customer process requirements, and serve chip production, advanced packaging, MEMS, LED, OLED, 3D-IC TSV and photovoltaic lines.
Its platforms address both 300mm front-end processing and thick-resist advanced packaging, including the KS-FT200/300 coater/developer that handles 28nm-and-above front-end nodes across ArF, KrF, I-Line, PI, BARC, SOC, SOD and SOG materials. The KS-C300 cluster tool serves advanced packaging, MEMS and OLED and accepts silicon, glass, bonded and compound wafers.
