STARLIGHT is Inversion Semiconductor’s planned tunable soft X-ray source for lithography development and related applications.
Currently Offered
STARLIGHT is a tunable soft X-ray source being developed by Inversion Semiconductor. The company describes it as part of its BELLA-LUX collaboration, using laser-driven plasma wakefields to accelerate electrons over short distances. Its stated development goal is one kilowatt of light across wavelengths from six to twenty nanometers.
The source is intended to support the company’s planned LITH-0 lithography system, with mirror development and silicon patterning demonstrations preceding broader fabrication uses. Inversion is also exploring industrial X-ray imaging and semiconductor mask inspection as early applications. These capabilities are development plans described by the founders, rather than claims of a deployed production system.